Direct Position Measurement / Clear Aperture Compatible P-733Z
High-rigidity piezo Z-stage achieving 0.3 nm resolution and high-speed response.
The P-733.Z is a high-stiffness piezo Z nano-positioning stage that combines nanometer-level resolution with high-speed response performance. It features a travel range of 100µm and a clear aperture of 50×50mm, making it suitable for applications such as positioning in microscopes and masks/wafers. Non-contact capacitive sensors enable measurements with sub-nanometer resolution. It also achieves a maximum resolution of 0.3nm and high repeatability. The flexure guide structure eliminates wear and backlash, allowing for stable high-precision positioning over long periods. It employs PI's proprietary PICMA(R) actuators, achieving up to 10 times the lifespan compared to conventional polymer-insulated actuators.
- Company：PI Japan
- Price：Other
